BEGIN:VCALENDAR
VERSION:2.0
PRODID:-//EFDS - ECPv6.16.4.1//NONSGML v1.0//EN
CALSCALE:GREGORIAN
METHOD:PUBLISH
X-ORIGINAL-URL:https://efds.org
X-WR-CALDESC:Veranstaltungen für EFDS
REFRESH-INTERVAL;VALUE=DURATION:PT1H
X-Robots-Tag:noindex
X-PUBLISHED-TTL:PT1H
BEGIN:VTIMEZONE
TZID:Europe/Berlin
BEGIN:DAYLIGHT
TZOFFSETFROM:+0100
TZOFFSETTO:+0200
TZNAME:CEST
DTSTART:20240331T010000
END:DAYLIGHT
BEGIN:STANDARD
TZOFFSETFROM:+0200
TZOFFSETTO:+0100
TZNAME:CET
DTSTART:20241027T010000
END:STANDARD
BEGIN:DAYLIGHT
TZOFFSETFROM:+0100
TZOFFSETTO:+0200
TZNAME:CEST
DTSTART:20250330T010000
END:DAYLIGHT
BEGIN:STANDARD
TZOFFSETFROM:+0200
TZOFFSETTO:+0100
TZNAME:CET
DTSTART:20251026T010000
END:STANDARD
BEGIN:DAYLIGHT
TZOFFSETFROM:+0100
TZOFFSETTO:+0200
TZNAME:CEST
DTSTART:20260329T010000
END:DAYLIGHT
BEGIN:STANDARD
TZOFFSETFROM:+0200
TZOFFSETTO:+0100
TZNAME:CET
DTSTART:20261025T010000
END:STANDARD
END:VTIMEZONE
BEGIN:VEVENT
DTSTART;VALUE=DATE:20251202
DTEND;VALUE=DATE:20251204
DTSTAMP:20251125T161729Z
CREATED:20240808T135759Z
LAST-MODIFIED:20251125T161729Z
UID:10000177-1764633600-1764806399@efds.org
SUMMARY:International Workshop "Stable Control and efficient design of industrial plasma processes with plasma diagnostics"
DESCRIPTION:Plasma technologies for surface modification and layer deposition are industrially established and many products in semiconductor technology\, the automotive industry\, medical technology\, etc. are no longer conceivable today without technological plasma processes. \nSpecific process control is essential to ensure process reliability when using plasma technology. Continuous further development of the relevant diagnostics is required to optimize and ultimately reduce the costs of production processes. \nThe workshop “Stable Control and efficient design of industrial plasma processes with plasma diagnostics” is dedicated to this topic. Renowned experts from research institutions will be presented basic insights as well as new innovative aspects for a stable process control. While Industrial partners will be demonstrated the implementation of well established tools by some impressive examples. Simple methods that are well suited for industrial use will also be presented. But also very specialized diagnostic procedures and new possibilities by using artificial intelligence will be addressed. \nThe Workshop is planned for: \n\nUsers of plasma technology\nDevelopers in plasma technology and plant engineering\nPhysicists and technicians from basic research\nStudents from the field to present their master\, diploma or PhD thesis and get in contact with potential employers\n\nProgram Outlook \n\nIntroduction to plasma diagnostics\nPlasma diagnostic methods | Fundamentals\, limitations\, and applications\nDiagnostic-based control of industrial plasma processes | Methods and process models incl. KI\, Fault Detection and Classification (FDC)\nInnovative developments with modelling and artificial intelligence\n\nWorkshop Booklet [PDF] \nPoster Presentations and Sponsoring \nPO001\nVirtual Metrology for reduced representation of spatially resolved etching depth in Bosch Process\nAditya Deshmukh\, Fraunhofer ENAS\, TU Freiberg\, Germany \nPO002\nProbe measurement technology MRP used in pulsed plasma processes\nMoritz Oberberg\, House of Plasma\, Germany \nPO003\nPlasmaMon – a development tool for plasma technique and plasma technology\nHerrmann Schlemm\, Jenion\, Germany \nYou want to present your work to an international community? Send your poster to be presented at this event.\nAbstract Termplate [PDF] \nYou would like to use this special platform for your advertisements. Check the possibilites here or contact us to discuss your individual possibilites. \nSponsoring Offer [PDF] \nBooking Form for Sponsoring [PDF]  \nYour participation:\n\nEarly Bird – Registration | 730\,00 EUR (until 31.08.2025)\nStandard – Registration | 830\,00 EUR (from 01.09.2025)\nStudent – Registration | 420 EUR\n\nHotel recommendations:\n\n\nPenck Hotel Dresden | Ostra-Allee 33 | 01067 Dresden | reservierung@penckhotel.de | Phone +49 351-4922-78\nHilton Dresden | An der Frauenkirche 5 | 01067 Dresden | info@hiltondresden.com | Phone +49 351 86420 \nHoliday Inn Express Dresden Zentrum | Prager Strasse 13 | 01069 Dresden | DE01.reservation@LROHotels.com | Phone +49 69 96759 549\n\nDORMERO Hotel Dresden City | Kreischaer Strasse 2 | 01219 Dresden | dresden-city@dormero.de | Phone +49 351 87310\nINNSiDE by Meliá Dresden | Salzgasse 4 | 01067 Dresden | innside.dresden@melia.com | Phone +49 351-795150 | melia.com
URL:https://efds.org/event/wsdiag3/
LOCATION:Fraunhofer Institute for Electron Beam and Plasma Technology FEP\, Winterbergstraße 28\, Dresden (Germany)\, 01277
CATEGORIES:EFDS-Veranstaltung,Workshop
ORGANIZER;CN="Europ%C3%A4ische Forschungsgesellschaft D%C3%BCnne Schichten e.V.":MAILTO:info@efds.org
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