{"id":28272,"date":"2022-08-30T09:31:50","date_gmt":"2022-08-30T07:31:50","guid":{"rendered":"https:\/\/efds.org\/research\/projects-and-plans\/completed-projects\/"},"modified":"2026-02-06T12:39:17","modified_gmt":"2026-02-06T11:39:17","slug":"completed-projects","status":"publish","type":"page","link":"https:\/\/efds.org\/en\/research\/projects-and-plans\/completed-projects\/","title":{"rendered":"Completed projects"},"content":{"rendered":"\t\t
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Completed projects<\/h1>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/i><\/span>\n\t\t\t\t\t\t\t\t<\/i><\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\tResource-efficient plasma nitriding of stainless steels for combined tribological and corrosive stresses - RePlaNiro<\/a>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t

AiF-Nr. 22449 N | EFDS-Nr. IGF-19\/14<\/p>\n

period:<\/strong> 01.08.2022 \u2013 31.07.2025<\/p>\n

research institution<\/strong><\/p>\n

Technische Universit\u00e4t Darmstadt, Staatliche Materialpr\u00fcfungsanstalt Darmstadt
Technische Universit\u00e4t Braunschweig, Institut f\u00fcr Oberfl\u00e4chentechnik<\/p>\n

Abstract<\/strong><\/p>\n

Austenitic steels are often plasma-nitrided for increased wear protection, particularly in the food industry, medical technology and chemical plant engineering. Wear resistance is dominated by the thickness of the hard S phase formed during plasma nitriding. The steel used and the material structure significantly influence the thickness of the S-phase and the corrosion behavior under otherwise identical treatment conditions. Therefore, maintaining the corrosion resistance of plasma-nitrided steels remains problematic to this day and cannot be reproducibly guaranteed.
Ziel ist die Ermittlung von Kenngr\u00f6\u00dfen f\u00fcr eine auf Werkstoff und Werkstoffzustand austenitischer St\u00e4hle individuell optimierte Plasmanitrierbehandlung, um die zu erreichenden Zielgr\u00f6\u00dfen hinsichtlich des Verschlei\u00dfschutzes prozesssicher zu erreichen und gleichzeitig die Korrosionsbest\u00e4ndigkeit aufrecht zu erhalten.
The intended results hold the following innovation potential:
– Scientific and technical basis for the selection of treatment parameters during plasma nitriding
– Identification of limit values and parameter windows to ensure reproducible treatment results
– Economic advantages due to the material-adapted optimization of the treatment parameters as well as the reduction of damage or complaints
– Ecological advantages by ensuring or increasing the service life of components
– Gain in confidence through improved advice and product quality for reproducible achievement of the required corrosion and wear protection<\/p>\n

Thus, the benefits and significance of the project are very high, especially for SMEs. The potential user group concerns the economic sectors 24 (metal production and processing); 28 (mechanical engineering), 29 (manufacture of motor vehicles and motor vehicle parts), 30 (other vehicle construction) as well as 20 (manufacture of chemical products) and 21 (manufacture of pharmaceutical products).<\/p>\n

Poster – project results [PDF]<\/a><\/p>\n

Final Report [PDF]<\/a><\/p>\n

Publications:<\/strong><\/p>\n

[IOT-01] Development of a Model to Predict the Thickness of the s-Phase and Corrosion Behavior of Plasma-Nitrided Austenitic Steels, 66th Annual SVC Technical Conference, Washington D.C. <\/em><\/p>\n

[IOT-02] Development of a model to predict the thickness of the s-phase and surface properties of plasma-nitrided austenitic steels, 13th Asian-European International Conference on Plasma Surface Engineer-ing (AEPSE), Busan<\/em><\/p>\n

[IOT-03] Development of a model to predict the thickness of the s-phase and corrosion behavior of plasma-nitrided austenitic steels. 66th Annual Technical Conference Proceedings, Society of Vacuum Coaters <\/em><\/p>\n

[IOT-04] P. M. Reinders, G. Br\u00e4uer, A model to predict the s-phase thickness and the change in corrosion behavior toward H2SO4 of 316L austenitic stainless steel after plasma nitriding, Surface and Coatings Technology 475 (2023) 130135.<\/em><\/p>\n

[IOT-05] Effect of different plasma diffusion treatments on the surface properties of austenitic stainless steels, 19th plasma surface engineering (PSE), Erfurt <\/em><\/p>\n

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\"\"<\/a><\/p>\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t

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\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/i><\/span>\n\t\t\t\t\t\t\t\t<\/i><\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\tDevelopment of tribologically optimised tool surfaces for economical forming of high-strength Ti(Al) alloys at 750-1250\u00b0C - TiAlHighEnd<\/a>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t

AiF-Nr. 22645 BG | EFDS-Nr. IGF-18\/04<\/p>\n

period: <\/strong>01.10.2022 \u2013 30.06.2025<\/p>\n

Research centers<\/strong>
Fraunhofer-Institut f\u00fcr Werkzeugmaschinen und Umformtechnik IWU, Chemnitz
Fraunhofer-Institut f\u00fcr Schicht und Oberfl\u00e4chentechnik IST, Braunschweig<\/p>\n

Abstract<\/strong><\/p>\n

Very high temperatures of 750 up to 1250 \u00b0C are required for forming high-strength Ti(Al) alloys, which severely limits the choice of suitable tool materials. An additional limitation occurs due to the adhesion tendency of titanium and titanium aluminides, which cause problems during forming. The “bonding” can cause damage to the components and the tool. In addition, material wear is promoted by the tendency to adhesion. Adhesions or residues from the previous forming process act as abrasive particles during the subsequent forming process, causing the components and tools to wear as a result of the high forces. The focus of this research proposal is the development of tool coatings for the isothermal forming of Ti(Al) alloys. Suitable tribological investigations and forming model tests are used to investigate, evaluate, further develop and optimize the tribological behavior of the surface layer after plasma boron and diffusion alloying of high-temperature molybdenum-based materials such as titanium-zirconium-molybdenum, molybdenum-hafnium-carbon or zirconium-hafnium-molybdenum compared with Ti(Al) alloys. The manufacturers of Ti(Al) alloys, manufacturers of special materials for tools, toolmakers specializing in the processing of special materials and manufacturers of special lubricants are closely associated with this topic. Tool coatings and diffusion treatments for high-temperature forming are absolutely new territory for coating companies and contract treaters. Since the expected results can be transferred to the wear protection of other machine elements and tools subject to high thermal loads, there is also great interest from this side. Overall, the aim is to serve a highly specialized market for high-end products with a high SME share and very good growth prospects.<\/p>\n

Final Report TiAlHighEnd [PDF]<\/a><\/p>\n

Publications<\/strong><\/p>\n

1. Demmler, M. (2025): Innovationen im Bereich der Werkzeugtechnik: Beschichtung, Tieftemperaturbehandlung und neueste Poliertechnologien. Fachtagung Stanzen und Umformen. Fraunhofer IWU. Chemnitz, 30.01.2025.
2. Demmler, M., Mejauschek,M. (2025): Tribologisch optimierte Werkzeugoberfl\u00e4chen f\u00fcr die Umformung von Ti(Al)-Legierungen bis zu 1.250\u00b0C. Fraunhofer-Institute. Chemnitz. Online verf\u00fcgbar unter https:\/\/www.iwu.fraunhofer.de\/de\/projekte\/tribologisch-optimierte-werkzeugoberflaechen.html.
3. Heidrich, J. (2024): Umformsysteme und Pr\u00fcfmethoden f\u00fcr die Hochtemperaturumformung von Titan- und Molybd\u00e4nlegierungen. Tagung Werkstoffpr\u00fcfung. Krefeld, 05.12.2024.
4. Heidrich, J. (2025): Effekte einer zus\u00e4tzlichen Tieftemperatur- und Randschichtbehandlung auf die Standzeit von Umform- und Stanzwerkzeugen. TAE Stanztagung. Ostfildern, 04.02.2025.
5. Mejauschek, M. (2023): Optimisation of high-temperature tool materials by diffusion processes. Dresden, 18.09.2023.
6. Templin, D. (2025): Development of Tribologically Optimized Tool Surfaces for the Cost-Efficient Forming of High-Strength Ti(Al) Alloys at 750\u20131250 \u00b0C. EFDS. Dresden, 15.10.2025. <\/p>\n

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\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/i><\/span>\n\t\t\t\t\t\t\t\t<\/i><\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\tEvaluation of fatigue behavior on PVD coatings by means of vibration-induced cavitation - Kaverm<\/a>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t

AiF-Nr. 21807 N | EFDS-Nr. IGF-17\/10<\/p>\n

period: 01.05.2021 \u2013 30.04.2024<\/strong><\/p>\n

Research institutions:<\/strong>
Technical University of Darmstadt, State Materials Testing Institute Darmstadt<\/p>\n

Abstract:<\/strong>
Within the planned research project, fatigue stress is to be investigated with regard to the adhesion properties of functional coatings across the entire surface. For this purpose, application-relevant PVD coating systems (DLC, t aC, a C:H:Me) are to be selected in consultation with industry and samples or component sections are to be coated or made available. The necessary fatigue loading is to be generated by acoustic cavitation using ultrasonic coupled transducers (sonotrodes). The ASTM International (American Society for Testing and Materials) standard ASTM G32-16 provides a general test specification for tests on the ultrasonic coupling transducer, which is to be modified and further developed in the project. The test parameters (frequency, amplitude, test duration, medium, etc.) are varied with the aid of high-speed camera recordings in order to be able to evaluate the resulting stress in relation to the input variables in a spatially resolved manner. Based on the results, a comprehensive evaluation of the two-dimensional adhesion properties of the coatings relevant to the application as well as the suitability of the ultrasonic coupling oscillator method should be possible. The targeted parameter variations and the evaluation of the resulting interactions due to the changed stress combination form the basis of the qualifying further development of the cavitation investigation. The influence of the microstructure (e.g. columnar, amorphous structures, multilayer layers), as well as the possible developing crack growth within the coating are in the focus of the mechanistic description. The sonotrodes of the
ultrasonic coupling transducer are also to be adapted to specifically influence the cavitation in order to allow testing on simply contoured and curved functional surfaces for possible prenormative research.<\/p>\n

Final Report KavErm [PDF]<\/a><\/p>\n

Notice of result [PDF]<\/a><\/p>\n

Poster [PDF]<\/a><\/p>\n

Funding<\/strong><\/p>\n

The project is funded by the Federal Ministry for Economic Affairs and Climate Protection on the basis of a decision by the German Bundestag.<\/p>\n

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\"\"<\/a><\/p>\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t

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\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/i><\/span>\n\t\t\t\t\t\t\t\t<\/i><\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\tFunctionalization of battery powders<\/a>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t

AiF-Nr. 22233 BR | EFDS Nr. IGF-17\/17<\/p>\n

project period: 01.04.2022 \u2013 31.03.2024<\/strong><\/p>\n

research institution<\/strong><\/p>\n

Fraunhofer-Institut f\u00fcr Keramische Technologien und Systeme (IKTS), Dresden<\/p>\n

Abstract<\/strong><\/p>\n

For several years, electromobility has been a topic that the automotive industry, the German government and the EU have been addressing and have formulated very ambitious goals. Current developments in electromobility, driven in particular by the automotive industry, require the development and production of reliable and durable batteries. To meet future demand, new, scalable process technologies for optimized semi-finished products and raw materials (e.g. active material powder) must be available in addition to production facilities for complete battery systems. Against this background, it is clear that manufacturers of coating equipment, service providers\/contract coaters and suppliers of raw materials can participate precisely at the beginning of the battery production value chain. One problem with the current state of the art for lithium ion batteries is the use of active materials containing cobalt. Although cobalt can be partially extracted from recycling processes, open-pit mining of cobalt ores in the Democratic Republic of Congo is still the main resource in the extraction of this metal. For this reason, a major goal in this project is to develop a technology that avoids or greatly minimizes the use of cobalt or other critical raw materials, thereby contributing to sustainable technology development. The project will therefore use the Co-free high-voltage material LiNi0.5Mn1.5O4 as well as a high-nickel NCM with a low Co content (10%). The project aims to develop and evaluate coatings on active materials that will significantly facilitate and advance the use of Co-free or Co-low active materials. The main objectives of the project are to increase the energy density and service life of the batteries and to prevent degradation of the electrolyte by means of a suitable coating of the active material.<\/p>\n

Poster [PDF]<\/a><\/p>\n

Notice of result [PDF]<\/a><\/p>\n

Publications<\/strong><\/p>\n

Vortrag | Titel: ALD for Lithium-Ion Batteries – Enhancing LIBs by Coating Cathode Active Material Powder via ALD, Autoren: M. Radehaus; PSE 2022, Erfurt, Ver\u00f6ffentlicht am: 14.09.2022<\/p>\n

Poster | Titel: Functional coating of active material powders for enhancing Lithium-ion batteries, Autoren: M. Radehaus, J. P. Beaupain, E. Siebecke, H. Auer, M. H\u00f6hn; Konferenz\/Tagung: V2023, Dresden, Ver\u00f6ffentlicht am: 19.-21.09.2023<\/p>\n

Vortrag | Wet-Chemical Spray Drying of Coatings on Cathode Active Materials for Solid-State Batteries; Autoren: J.P. Beaupain, K. W\u00e4tzig, S. Yanev, H. Auer, K. Nikolowski, M. Partsch und M. Kusnezoff, Konferenz\/Tagung: ICACC 2023 in Daytona, USA; Ver\u00f6ffentlicht am: 23.01.2023<\/p>\n

Vortrag | Titel: Protective Coatings of Cathode Active Materials for Thiophosphate-based Solid-State Batteries; Autoren: J.P. Beaupain, K. W\u00e4tzig, S. Yanev, N. Zapp, H. Auer, K. Nikolowski, M. Partsch und M. Kusnezoff; Konferenz\/Tagung: DKG-Tagung in Jena, Ver\u00f6ffentlicht am: 27.03.2023<\/p>\n

Vortrag | Titel: Application of very thin coatings on different grades of particles by ALD; Autoren: M. Krug; Konferenz\/Tagung: ALD for Industry 2024, Dresden; Ver\u00f6ffentlicht am: 13.03.2024<\/p>\n

Poster | Titel: Rotating drum ALD \u2013 an alternative approach for ALD coating of powders, Autoren: M. Krug, M. Radehaus, M. H\u00f6hn, S. Yanev, P. Heizmann; Konferenz\/Tagung: AVS ALD\/ALE 2024 Helsinki; Ver\u00f6ffentlicht am: 06.08.2024<\/p>\n

Artikel | Titel: Hochaufl\u00f6sende Charakterisierung von beschichteten Batteriepulvern; Autoren: S. H\u00f6hn, K. Gnauck, M. H\u00f6hn, J. P. Beaupain; Zeitschrift: IKTS Jahresbericht; Ver\u00f6ffentlicht am: 2024<\/p>\n

Artikel | Titel: Funktionale Beschichtung von Batteriepulvern – Entwicklung ultrad\u00fcnner Schichten zur Erh\u00f6hung der Lebensdauer von Batterien; Autoren: M. H\u00f6hn, J. P. Beaupain, E. Siebecke, M. Krug, S. H\u00f6hn; Zeitschrift: Vakuum in Forschung und Praxis; Ver\u00f6ffentlicht am: Vol. 36 Nr. 3 Juli 2024 DOI:10.1002\/vipr.202400816 <\/p>\n

Funding<\/strong><\/p>\n

The project is funded by the Federal Ministry for Economic Affairs and Climate Protection on the basis of a decision by the German Bundestag.<\/p>\n<\/p>\n

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\"\"<\/a><\/p>\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t

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\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/i><\/span>\n\t\t\t\t\t\t\t\t<\/i><\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\tInvestigation of the material behavior of ultrathin flexible glass in layered composites - CUSTOM.<\/a>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t

AiF-Nr. 21708 BR | EFDS-Nr. IGF-19\/04<\/p>\n

project period: 01.03.2021 \u2013 28.02.2023<\/strong><\/p>\n

Research Institutes:<\/strong>
Fraunhofer-Institut f\u00fcr Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
Fraunhofer-Institut f\u00fcr f\u00fcr Mikrostruktur von Werkstoffen und Systemen IMWS<\/p>\n

Abstract:
<\/strong>Ultra-thin glasses (UTGs) with thicknesses of less than 100 \u03bcm are lightweight, flexible, and dimensionally stable, exhibiting low surface roughness and high thermal and mechanical strength. Compared to flexible organic materials, they are not permeable to water or oxygen. With the market launch of foldable displays, UTGs have recently entered mass production, but so far only in select high-priced products.
To establish UTGs as a flexible substrate material and alternative to polymer films, stable and reliable production processes must be developed. In these processes, mechanical failure of UTGs during the process has previously led to random, time-consuming, and costly production downtimes. To reduce the scrap rate, this project aims to gain fundamental insights into the mechanical behavior of UTGs during functionalization. This is particularly relevant because the mechanical properties change during the process due to separation, coating, and handling\/transport of the UTGs. The following project objectives are the primary focus:
1. Determination of the initial strength of the UTG, particularly edge strength
2. Investigation of the influence of selected coating and separation processes on the mechanical properties
of the UTG, particularly edge strength and fatigue behavior
3. Correlation and evaluation of the results for two application cases: transparent electrode and anti-reflective coating system <\/p>\n

The strength parameters obtained can be used directly for the dimensioning and design of plants along the entire value chain of UTG processing, especially by the SMEs involved in the PbA. Furthermore, based on the knowledge gained about the mechanical behavior of UTG, companies will be able to open up new fields of application for UTG and develop innovative products in a short time. <\/p>\n

Final Report [PDF]<\/a>
Poster [PDF]<\/a><\/p>\n<\/p>\n

Publication<\/strong><\/p>\n

Langgemach, W., Lorenz, G., T\u00e4schner, K. and Neidhardt, J. (2023), Optische Schichten und ihr Einfluss auf die Belastbarkeit flexibler Gl\u00e4ser. Vakuum in Forschung und Praxis, 35: 28-33. https:\/\/doi.org\/10.1002\/vipr.202300803<\/a><\/p>\n

Langgemach, W., R\u00e4dlein, E. (2023), A new method \u2013 Evaluation of the influence of coatings on the strength and fatigue strength of flexible glass, submitted<\/strong> to Journal of Electronic Materials in 10\/2023 (01\/2024: under review). <\/p>\n

Langgemach, W., Baumann, A., Ehrhardt, M., Preu\u00dfner, T., R\u00e4dlein, E. (2023), The strength of uncoated and coated ultra-thin flexible glass under cyclic load, submitted<\/strong> to AIMS Materials Science in 12\/2023 (01\/2024: under review).<\/p>\n

<\/strong><\/p>\n

\"\"<\/p>\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t

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\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/i><\/span>\n\t\t\t\t\t\t\t\t<\/i><\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\tTRISTAN \u2013 Development of tricoactive, temperature-resistant (Cr,Al)N+XS2 coatings by means of pulsed arc PVD technology for dry running and diesel lubrication<\/a>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t

AiF-Nr. 20431 N | EFDS-Nr. IGF-16\/13<\/p>\n

project period: 01.09.2019 \u2013 31.08.2022<\/p>\n

research institute<\/strong>
Institut f\u00fcr Oberfl\u00e4chentechnik IOT der RWTH Aachen<\/p>\n

Abstract
<\/strong><\/p>\n

Energy-efficient mobility is necessary in order to avoid mobility restrictions in the future and to protect the environment. Increasing the efficiency of vehicle drive trains is of great importance here. The efficiency of a drivetrain is significantly influenced by friction in tribological contacts. Currently, the most important approach to reducing friction in the drivetrain is the use of lubricants, but this has technical, economic and ecological disadvantages depending on the type and the physical and chemical properties of the lubricant. In the field of electromobility, water-based lubricants are increasingly being used to reduce friction thanks to the low viscosity of the lubricants. An extension of the approach to holistic friction reduction is the elimination of conventional lubricants in the drivetrain, as internal friction in the lubricant as well as splashing and flexing can be eliminated. Dry running is therefore a promising concept for increasing the efficiency of drivetrains. However, its implementation requires an adaptation of the surface properties in tribological contact as a result of the changed load collective. For this reason, the proposed project will develop Cr-based nitride hard coatings with self-lubricating properties to reduce friction and wear in the dry running of drivetrain components such as joints. The nitride hard material matrix (Cr,Al)N is doped with Mo or W and S for this purpose. This enables the formation of the solid lubricants molybdenum or tungsten disulphide in tribological contact and thus the reduction of friction and wear in dry running. The layers are produced using the industrially relevant process of arc evaporation, which is being further developed as part of the project with regard to pulsed power supplies.<\/p>\n

Publication<\/strong><\/p>\n

K. Bobzin, C. Kalscheuer, M.P. M\u00f6bius: News from Research, TRISTAN \u2013 Development of self-lubri-cating (Cr,Al)N+X:S coatings by pulsed arc PVD technology for dry-running powertrain components\u201d, EFDS-Newsletter, 12\/2022<\/p>\n

K. Bobzin, C. Kalscheuer, M.P. M\u00f6bius: Neues aus der PVD-Technologie \u2013 Forscher am IOT der RWTH Aachen zeigen Vorteile gepulster Lichtbogenverdampfung\u201c, Magazin f\u00fcr Oberfl\u00e4chentechnik, 02\/2023<\/p>\n

Final Report [PDF]<\/a><\/p>\n

Poster [PDF]<\/a><\/p>\n

\"\"<\/p>\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t

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\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/i><\/span>\n\t\t\t\t\t\t\t\t<\/i><\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\tReactive magnetron sputtering of semiconductor thin films.<\/a>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t

AiF-Nr. 20963 BG | EFDS-Nr. IGF-18\/05<\/p>\n

project period: 01.01.2020 \u2013 30.06.2022<\/strong><\/p>\n

research institute<\/strong>
Optotransmitter-Umweltschutz-Technologie e.V. (OUT)
Otto-von-Guericke-Universit\u00e4t<\/p>\n

Abstract<\/strong><\/p>\n

The aim of the project is to develop reactive sputter deposition processes for the production of nitride semiconductor layers for optoelectronics and power electronics as well as for solar energy systems. Although basic processes are available, they have not yet been sufficiently studied for commercial exploitation. Thus, deposition rates are still low and plasma-induced damage to the film is not understood. Investigations into the doping of the layers and the controlled deposition of ternary layers are essential for the construction of components.
In order to achieve a better understanding of these processes and thus better control, the effects of plasma generation on the particle energies must be studied. For this purpose, investigations of the plasma and the coating process by means of plasma and coating diagnostics are planned in order to shed comprehensive light on the relationships between particle energy, both to favor coating growth and coating damage by high-energy particles. The dosage of the energy input via pulsed plasmas in combination with a high plasma density could be of fundamental importance here. The very short pulse durations (< 500 \u03bcs) in HIPIMS result in high ionization of the process gas and thus increased ion support. This could be the key to catching up to growth rates comparable to common GaN-based fabrication processes such as metal organic vapor phase deposition (MOVPE) (about 2 \u03bcm\/h). For SMEs, reactive sputtering of nitride semiconductors is a cost-effective alternative to MOVPE because it has lower initial and ongoing costs. The sputtering technology to be developed for nitride semiconductors can provide the material basis for innovative products, especially for the development of new business areas in the fields of power electronics as well as hydrogen and fuel cell technology.<\/p>\n

Final Report [PDF]<\/a><\/p>\n

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AiF-Nr. 21197 BR | EFDS-Nr. IGF-17\/19<\/p>\n

Laufzeit: 01.06.2020 \u2013 31.05.2022<\/p>\n

Research institutions:<\/strong><\/p>\n