Dear participants,
at the beginning of the Web-Event you will be asked to login over the button „Event Room“ below.
(Recently the Event Room is closed.) This workshop will be handled with Microsoft Teams.

During the event week the access will be secured by password. Registered participants will receive their login data via E-mail.

Register Now!

Event ROOM

Meeting Room 1

Meeting Room 2

Meeting Room 3


Welcome & Market Place
Discover the event website and
meet other participants

13:00  Introduction
„Overview of simulation concepts for atomic layer processing“
Jörg Schuster, Fraunhofer ENAS, Chemnitz, Germany

Abstract Jörg Schuster [PDF]

13:20 Workshop Session 1

13:20 Keynote Presentation
„Concepts and Preconceptions – the Outlook for Simulations in ALD“
Simon Elliott, Schrödinger Inc., New York, USA

Abstract Simon Elliott [PDF]

13:50 Presentation
„Atomistic simulations of atomic layer processes“
Xiao Hu, Center for Microtechnologies, Technische Universität Chemnitz, Chemnitz, Germany

Abstract Xiao Hu [PDF]

14:10 Presentation
„In silico ALD – more bits and less pieces“
Henrik Pedersen, Linköping University, Linköping, Sweden

Abstract Henrik Pedersen [PDF]

14:30 Break

14:45 Discussion
Simulation Talk
moderated by Jonas Sundqvist and Linda Jäckel
Experts – Simon Elliott, Schrödinger Inc. and Jacques Kools, Encapsulix

15:30 WORKSHOP Session 2

15:30 Presentation
„The DSMC Method – A Simulation Approach for Low Pressure ALD Processes“
Asim Mirza, boltzplatz GmbH, Stuttgart, Germany

Abstract Asim Mirza [PDF]

15:50 Presentation
„Modeling and Simulation of ALD in a Level Set Framework“
Lado Filipovic, Institute for Microelectronics, Technische Universität Wien, Vienna, Austria

Abstract Lado Filipovic [PDF]

16:10 Presentation
„3D Monte Carlo simulations for a better understanding of conformality of ALD“
Véronique Cremers, Department of Solid State Sciences, Ghent University, Ghent, Belgium

Abstract Véronique Cremers [PDF]

16:30 Presentation
„Computational modelling of ALD reactors: Linking transport phenomena with surface mechanisms“
Giorgos Gakis, National Technical University of Athens, Athens, Greece

Abstract Giorgos Gakis [PDF]

16:50 Presentation
„Simulation for design of ALD equipment“
Jacques Kools, Encapsulix S.A., Simiane-Collongue, France

Abstract Jaque Kools [PDF]

17:15 END of offizial Program

17:15 – 17:45 
After Work Discussion
moderated by Jonas and Linda

You are invited to get in discussion also after the official end of the program. All meeting rooms will stay open for you.

DOWNLOAD & Communication

This Live Web-Event shall give you the opportunity to get into discussion and get to know each other. Listen to speakers and ask questions. But also discover the possibilities to speak with other participants in open or direct discussion.

Live Presentations

Meet the speakers in the Event Room and ask your questions live or in the chat. 

Meeting Rooms

Use the three Meeting Rooms
(on top of this event website) and make appointments with your people of interest.

Simulation Talk

Moderated discussion with experts about multi-scale approaches. Ask your questions and discuss together with us about the initiation of next activities.

Contact Board

You are new in the Community? Present your Personal Contact Card online and easily find the right partners for you.


James Smith, Company, City, Country
Phone: +XX 134 5678910

Working Field: Simulation software Development
Search & Find: I am looking for a contact to discuss applications for process simulations.

Samantha Watson, Company, City, Country
Phone: +XX 134 5678910

Working Field: ALD process development
Search & Find: How can I simulate my plasma ALD process? (low time level, but much information)

You would like to publish your personal contact card during the event?
The access to this website will be secured by password when the event will start and will be visible to participants only.  Please write us an E-mail with the needed information as the examples above and the name of the event „Simulation for ALD“ to

Market Place

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Here YOUR company or institute sould be presented?
Please call us or write an E-mail, when you want to know more …
Phone +49 351 8718370     Email: